10L plasma cleaner is equipped with a mechanical vacuum pump, while vacuuming maintains the vacuum of the chamber, the pollutants after the plasma reaction can also be pumped away by the vacuum pump; therefore, the short-time cleaning can completely clean the organic pollutants.
Model:OLT-PS-10L
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Main parts
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Item
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Parameters
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Cleaning the chamber
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Chamber material
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High purity quartz
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Chamber size
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Diameter 200 mm; Length 340 mm
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RF power supply
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Power supply features
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The power supply is an all-solid-state RF power supply, and adopts a high-stability and high-reliability power amplifier module and a DC module, which effectively ensures the RF power output of the power supply. High quality electronic components are used to ensure the reliability of the products.
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Power advantage
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● Long time normal operation
● Simple and flexible operation
● High power supply efficiency and low heat generation
●With perfect reflection power protection function
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RF power
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0~100W continuously adjustable/0~150W continuously adjustable
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Signal frequency
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13.56MHz ±0.005%
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Reflected power
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≤100W
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Power stability
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±0.1%
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RF connector
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N type connector
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Machine efficiency
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≥75%
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Harmonic component
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≤-50 dBc
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cooling method
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Forced air cooling
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Gas measurement
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Measuring unit
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Float flowmeter
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Gas channel
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Two channels
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A channel range
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10～100ml
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B channel range
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16～160ml
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Vacuum
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Vacuum measurement
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Digital vacuum gauge (resistance gauge)
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Vacuum pump
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Two-stage rotary vane vacuum pump
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Motor speed
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50 Hz: 1440; 60 Hz: 1720
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Pumping rate
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50 Hz: 1.1L/s; 60 Hz: 1.3L/s
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Vacuum range
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0.1Pa～10000Pa
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Ultimate vacuum
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0.5Pa
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Motor noise
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≤56dB
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Pipe interface
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Gas inlet: KF16; exhaust port KF16.
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Connecting pipe
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KF16 vacuum bellows
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Vacuum valve
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Solenoid valve
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Motor Power
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400W
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Others
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Power supply
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AC108V-240V 50/60Hz
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Total power
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550W/600W
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Operating temperature
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-10℃- 40℃
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Working vacuum
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≤40Pa
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Overall size
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600mm×500mm×560mm
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Total Weight
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80kg (including packaging)
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In addition to the cleaning function, this small plasma cleaner can change the surface properties of some materials according to the needs under certain conditions. During the cleaning process, the glow discharge of the small plasma cleaner not only enhances the adhesion, compatibility and wettability of these materials, but also disinfects and sterilizes the materials.
This plasma cleaner is suitable for laboratory and small-scale production. Using 13.56Mhz rf power supply, can be used to match a variety of commonly used gas plasma. There are a variety of common specifications for RF power supply from 100W to 1000W, which can meet the diverse needs of users.
Metal: remove oil, greasy dirt and other organic matter and oxide layer on the metal surface;
Automotive manufacturing: used for pre-treatment of plastics and paint spraying in automotive manufacturing processes;
Textile production: used for the hydrophilicity, hydrophobicity and surface modification of textiles, filter screens and films;
Biomedicine: Petri dishes enhance activity, vascular stents, syringes, catheters and pro-wetting of various materials, before cross-coating treatment;
Aerospace: surface coating pretreatment of insulating materials, electronic components, etc.;
Electronics: circuit board cleaning and etching. Non-oxidation and activation treatment of PP and other materials, to improve solderability;
Semiconductor industry: wafer processing and processing to remove photoresist, pre-package pretreatment;
LED: Pre-treatment before the bracket is cleaned and packaged;
Plastic rubber: Improve the surface activity of PS, PE, PTFE, TPE, POM, AS and PP, making it easy to bond and print.
