1200 ℃ slider-type dual-zone PECVD system
SPECIFICATIONS
|
Model
|
TOB-DSP-1200℃
-PECVD-I
|
TOB-DSP-1200℃
-PECVD-II
|
TOB-DSP-1200℃
-PECVD-III
|
TOB-DSP-1200℃
-PECVD-IV
|
|
Power
|
3KW
|
3KW
|
4KW
|
4KW
|
|
Furnace tube size(mm)
|
Dia 60(OD) X1800mm
|
Dia 80(OD) X1800mm
|
Dia 100(OD) X1800mm
|
Dia 120(OD) X1800mm
|
|
Dimension
|
1800X410X610
|
1800X410X610
|
1800X460X660
|
1800X460X660
|
|
Power supply voltage
|
220V
|
|
Phase number
|
Single-phase
|
|
Control mode
|
Yudian temperature control
30 sections can only use PID temperature regulation.
FP93 temperature control (from Japan)
(Replace imported instruments, for an additional fee)
1,40 section program temperature control can be divided into 4,2,1 group program, if the program is divided into four groups, each program segment 10,
2,6 group PID control, low, medium and high temperature can each with a set of PID, such that each segment is capable of controlling the temperature is very accurate.
|
|
Temperature control mode
|
Intelligent PID
|
|
Burnout protection and display
|
Yes
|
|
Over-temperature protection
|
Yes
|
|
Overcurrent protection
|
Yes
|
|
Control accuracy
|
+/- 1 ℃
|
|
Trigger
|
Phase-shift trigger
|
|
SCR
|
106 / 16E Germany Simon Kang
|
|
The 1.2 temperature zone max temperature
|
1200 ℃
|
|
The 1.2 temperature zone
Rated temperature
|
1150 ℃
|
|
Heating rate
|
≤30 ℃ / Min (Available upon request modification)
|
|
Recommended heating rate
|
≤15 ℃ / Min
|
|
Thermocouple Type
|
K type
|
|
The 1.2 temperature zone heating length
|
205mm
|
|
Surrounding surface temperature
|
≤45℃
|
|
Plasma RF Power
|
Power output range
|
0-500W
|
|
Maximum reflected power
|
10W
|
|
Signal frequency
|
13.56MHZ ± 0.005%
|
|
Noise
|
<30 dB
|
|
Air cooling
|
cooling method
|
|
Input Power
|
208-240V 50 / 60HZ
|
|
GX supply system main parameters
|
Standard range
|
Proton flow controller 5,10,20,30,50,100,200,300,500SCCM, 1,2,3,5,10SLM
(you can choose any scale)
|
|
Accuracy
|
± 1.5%
|
|
Pressure drop
|
<0.01MPa
|
|
Repeatability
|
± 0.2% F.S
|
|
Max
Operating pressure
|
3MP
|
|
VS-0.1 exhaust system
|
power supply
|
220V / 380V 380W
|
|
Pumping rate
|
2L / S
|
|
Resistance vacuum gauge
|
ZDR-I
|
|
Vacuum measurement range
|
0.1-10 5 Pa
|
|
Vacuum pump
|
VRD-8
|
|
Corrugated pipe
|
KF25X1000mm
|
|
Vacuum system
|
10 -1Pa
|
Email : tob.amy@tobmachine.com
Skype : amywangbest86
Whatsapp/Phone number : +86 181 2071 5609
