Advanced Energy is a technology leader with innovative RF power supplies and match networks that transfer the RF power to the plasma, responding nearly instantaneously to changes in the etch or deposition process steps. Better power transfer means less wasted power, enabling the lowest possible power to be consumed.
AE also pioneered plasma power beyond RF. AE innovations have enabled manufacturers to re-think how power is delivered and managed in plasma-based applications for process characterization and control. Advanced Energy created its eVoS™ asymmetric bias waveform generator technology for a huge step forward in power transfer efficiency. AE's Navigator II digital match networks have also set the standards for fast and highly capable RF delivery for the least reflected and wasted RF power.
