1600C PECVD Furnace with Gas Supply System and Vacuum System
The
PECVD system consists of a tube furnace, a quartz vacuum chamber, a vacuum
system, a gas supply system, and a radio frequency power supply system. Mainly
used for: growth of metal thin films, ceramic thin films, composite thin films,
graphene, etc. It is easy to add functions, and can expand functions such as
plasma cleaning and etching. The PECVD system has the advantages of high film
deposition rate, good uniformity, high consistency and stability.
Detailed technical
parameters
|
Model
|
TL1600-I
|
|
Power
|
5KW
|
|
Tube size（OD）(mm)
|
High-purity corundum tube:60mm(tube diameter)
Two furnace plugs are placed on each side. The
furnace plug can block the heat radiation in the center of the furnace tube
and must be placed in the correct position in the furnace before heating.
|
|
Dimension
|
1120X490X855
|
|
supply voltage
|
220V
|
|
phase
|
single phase
|
|
heating element
|
1800 model silicon molybdenum bar
|
|
Temperature control type
|
Use
Yudian program temperature control instrument (standard)
1.
30-segment program temperature control intelligent PID adjustment.
2.
With over-temperature protection, the electric furnace heating circuit will
be automatically cut off when the temperature is over-temperature or when the
couple is broken. ON, the ON light on the panel is off, the OFF light is on,
and the electric furnace is limitedly protected).
3.
With 485 communication interface (standard with optional software)
4.
It has a power failure protection function, that is, when the furnace is
powered on after the power is turned off, the program does not start from the
initial temperature, but starts from the furnace temperature when the power
is off.
5.The
meter has the function of temperature self-tuning
(you need to pay extra for the replacement of imported
instruments, optional)
  
FP93 instrument EUROTHERM instrument Touch screen
instrument
(shimaden, Japan)
|
|
Chamber material
|
1. The hearth material is made of high quality
alumina polycrystalline fiber.
2. The surface of the inner furnace is coated with
imported 1800 degree high temperature alumina coating, which can increase the
emissivity and make the temperature field more balanced.
|
|
Valves and flanges
|
|
|
control precision
|
+/- 1℃
|
|
trigger
|
Phase-shifted trigger
|
|
electric appliance
|
Zhejiang chint
|
|
silicon controlled
|
106/16E SEMIKRON
|
|
Max. temp
|
1600℃
|
|
Rated temp
|
1550℃
|
|
heating rate
|
≤20℃/ Min(Can be modified as required)
|
|
Recommended rate of heating
|
≤10 ℃/ Min
|
|
Thermocouple model
|
B Type
|
|
Length of heating section
|
300mm
|
|
Ambient surface temperature
|
≤45℃
|
|
Vacuum system
|
VS-0.1
vacuum system
VS-0.1
vacuum system can draw the vacuum degree in the tube furnace tube to0.1Pa(and equipped with resistance vacuum gauge
display).
With LED green
screen digital display.
Adopt
VRD16 vacuum pump
|
VRD16
|
Technical term
|
Specification
|
|
VRD-16
|
Pumping speedm³/h（L/s）
|
50Hz
|
16 m³/h
|
|
4.4 L/s
|
|
60Hz
|
19.2 m³/h
|
|
5.2 L/s
|
|
Limit partial pressure - no gas ballast（Pa）
|
4x10-2
|
|
Limit total pressure - no gas ballast（Pa）
|
4x10-1
|
|
Limiting total pressure - gas ballast（Pa）
|
8x10-1
|
|
power supply
|
Single phase/three phase
|
|
motor power（KW）
|
0.75 KW/0.55 KW
|
|
Inlet/outlet connectionDN
|
KF25
|
|
oil capacity
|
0.9-1.5 L
|
|
motor speed（rpm）
|
50Hz
|
1440 rpm
|
|
|
Gas supply system
|
Gas
flow meter gas supply system
Technical parameters:
l Pneumatic channel: 6
l Pneumatic flow control: use mass flow meter.
l Cabinet size: 600X600X600mm
l With LED display
l Technical parameters of mass flowmeter:
|
Interface
|
Φ6
|
|
Display
|
LED
|
|
Working
environment temperature
|
5~45℃
|
|
Flow
controller
|
Proton
flow controller is used, please see the back
|
|
Stainless
steel tube
|
Φ6
outside X Φ4 inside
|
|
Pressure
vacuum table
|
-0.1～0.15 MPa, 0.01 MPa/div
|
|
Stop
valve
|
Φ6
|
|
Flow
control
|
PLC
intelligent control
|
Technical
parameters of Mass Flow Controller:
Product
description: Common type, analog circuit
Product
detailed description: Ordinary type, analog circuit, rubber seal, tubular
shunt, not easy to block.
Main
indicators:
|
Range
|
5, 10, 20, 30, 50, 100, 200SCCM(you can choose any range) Please confirm when
you place the order
|
|
Accuracy
|
±1% F.S
|
|
Linear
|
0.5% F.S
|
|
Repeatability
|
±0.2% F.S
|
|
Response
time
|
1S
|
|
Air
pressure drop
|
<0.01MPa
|
|
Maximum
pressure
|
3MP
|
|
Working
environment temperature
|
5～45℃
|
|
Input
and output signal
|
0～+5.00V
|
|
Power
supply
|
+15V 50mA -15V 50mA
|
|
Dimensions
|
158*30*110
|
|
Weight
|
0.9 Kg
|
Configuration of gas supply system:
|
Proton
flowmeter
|
6
|
|
Mechanical
pressure gauge (range -0.1~0.15MPa)
|
1
|
|
Stainless
steel globe valves
|
6
|
|
Stainless
steel through-plate connectors
|
6
|
|
Stainless
steel valve joints
|
2
|
|
stainless
steel cylinder connector
|
6
|
|
PTFE
tube
|
30M
|
|
Dia80X140MM
gas mixing tank
|
1
|
|
|
1 set
|
|
RF Generators / RF
Power Supplies
Main technical parameters of RF power supply:
|
Power output range
|
0-500W
|
|
Maximum reflected
power
|
200W
|
|
working frequency
|
RF: 13.56MHZ±0.005%
|
|
Power stability
|
+/-0.1%
|
|
Harmonic component
|
≤-50dbc
|
|
Rf region width
|
0-600mm adjustable
|
|
Matching way
|
automatic
|
|
Cooling mode
|
Points of cold
|
|
Noise
|
<50dB
|
|
Radio
frequency interface
|
50Ω N-type
|
|
Input power
|
208-240V 50/60HZ
|
Warranty
One year warranty and lifetime
technical support
Special Note:
1. Consumable parts such as
heating elements, furnace tubes, sample crucibles, etc. are not within the
warranty period.
2. Damage caused by the use of
corrosive gas and acid gas is not covered by the warranty.
Precautions
1. The air pressure in the
furnace tube should not be higher than 0.02MPa
2. Due to the high air
pressure inside the gas cylinder, a pressure relief valve must be installed on
the gas cylinder when gas is introduced into the furnace tube. To ensure
safety, it is recommended to use a pressure below 0.02MPa
3. When the furnace tube used
is corundum tube, when the furnace body temperature is higher than 1500 ℃, the furnace tube should not be in a vacuum state,
and the air pressure in the furnace tube should be equal to the atmospheric
pressure.
4. The gas flow into the
furnace tube should be less than 200SCCM to avoid the impact of the cold
airflow on the hot furnace tube
5. For the sample heating
experiment, it is not recommended to close the exhaust valve and inlet valve of
the furnace tube flange end. If you need to close the gas valve to heat the
sample, you must always pay attention to the indication of the pressure gauge.
If the pressure is greater than 0.02MPa, you must immediately open the exhaust
valve to prevent accidents (such as furnace tube rupture, flange flying out,
etc.) .
6. Do not use graphite
crucibles in alumina tubes.
7. MoSi2 heating element
should not be used at low temperature (400℃-700℃) for a long time, otherwise
it may damage the heating element.
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
