Precise control of plasma power is not the only way that Advanced Energy is helping to reduce the energy consumed in semiconductor fabrication. AE also adds functionality to its family of RF generator and matching systems that allow them to reduce or turn off power and cooling water when not actively processing. AE's Paramount RF power generators and Ascent DC now offers “idle” state options to reduce energy.
While creating low-power or “idle” states may sound straightforward,in reality it is very challenging, not least with respect to maintaining performance and throughput, which demands high levels of stability and the ability to provide instant response to rapidly changing conditions. Representing a significant shift in the way the industry views RF and DC power management, these advances (depending on specific fabrication requirements) can help drive down RF and DC system power consumption per plasma chamber by up to 50% during idle time.
