About Lithoghraphy
Lithography is the microfabrication technology that uses laser light for the production of Integrated Circuit (IC) and Liquid Crystal Display (LCD). The light is projected using a photomask (also known as a reticle) that contains the pattern of a circuit/device that will be printed onto a wafer. A lens or mirror focuses the pattern onto the wafer - a thin, round slice of semiconductor material - which is coated with a lightsensitive material (photo resist).
About Pellicle
Pellicle is a dust-proof cover that protects the photomask pattern from foreign materials and contributes to the productivity improvement of semiconductor manufacturing. The pellicle helps to prevent foreign materials from being printed onto semiconductor wafers.
