· The Chamber size is 134mm diameter, can accept wafer sample 4" diameter at Max.
· A 4" PTFE spin plate with the groove of 50x50mm is included, which can hlod 50 sq
mm, 0.3 mm thin sample plate in place during fast-spinning, so-called vacuunless
holder
· 7 pcs of 0.3 mm thickness nylon plate is included for holding irregular samples with
double-sided tape or carving.
· One roll of 3M removable double-sided tape (3/4' W x 400" L) is included for
immediate use
· Please click here to learn how to mount samples on the plate by using removable
double-sided tape. It is easy and more economical than vacuum chuck.
· You may use a 50x50mm blank (included) plate to make different groove via a knife
to fit your sample, or make an order space grooved plate from us.
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