Product features
The sensor is highly sensitive and has minimal initial flow.
The sensor chip adopts heat mass flow measurement without temperature pressure compensation, which ensures the high precision measurement of the sensor.
Multiple sensors are integrated on a single chip, which greatly increases the range ratio of the sensor.
The sensor has high zero stability.
All measuring ranges are high stability.
All measuring ranges are high accuracy and excellent repeatability.
Low power consumption, low pressure loss.
Fast response.
Mechanical dimensions
Technical parameters
|
Parameters
|
Numerical
|
Unit
|
|
Flow range
|
30,100,200,500,1000
|
sccm
|
|
Measuring proportion
|
100:1
|
|
|
Precision
|
±(1.5+0.5FS)
|
%
|
|
Repetitive
|
0.25
|
%
|
|
Zero output drift
|
±30
|
mV
|
|
Output drift
|
±0.12
|
%/°C
|
|
The response time
|
65(default,4,8,16,33,131 can be set up)
|
ms
|
|
Working power
|
8~24VDC,50mA
|
|
|
Output way
|
Linear:RS232/analog voltage0.5~4.5VDC
|
|
|
Maximum flow pressure loss
|
350
|
Pa
|
|
Maximum working pressure
|
≤0.5
|
MPa
|
|
Working temperature
|
-10+55
|
°C
|
|
Storage temperature
|
-20+65
|
°C
|
|
Working humidity
|
<95%RH(no ice,no frost)
|
|
|
Mechanical interface
|
Detachable hose fitting
|
|
|
Calibration mode
|
Air(20°C,101.325kPa)
|
|
|
Weight
|
15
|
g
|
|
Maximum allowable flow
|
3000
|
sccm
|
|
Maximum allowable flow change
|
500
|
Sccm/sec
|
Remark:The above parameters at 20 ° C, 101.325 kPa measured.
Product selection
*The unit of maximum flow is SCCM,for example 100 is 100 represents maximum flow of 100SCCM;
For co2 and laughing gas, the maximum flow can be 30,100,200,500,750 instead of 1000
**.The standard output of the sensor is analog voltage, and RS232 is the option.
