Product features
Mass flow and pressure can be measured
Fast response time
The sensor is highly sensitive and has minimal initial flow.
Low power consumption, low pressure loss.
Designed specifically for medical devices
Mechanical dimensions
Technical parameters
|
Parameters
|
Numerical
|
Unit
|
|
Flow signal
|
Flow range
|
-250~+250
|
SLPM
|
|
|
Precision
|
±(2.0+0.5FS)
|
%
|
|
|
Output mode²
|
Linear:analog voltage1²C
|
|
|
|
Analog output range
|
0.5~4.5
|
VDC
|
|
|
Respone time
|
5
|
ms
|
|
Pressure signal
|
Output type
|
Relative pressure
|
%/°C
|
|
|
Pressure range
|
-5~4.5
|
VDC
|
|
|
Precision
|
±0.8+0.5%FS)
|
|
|
|
Output mode²
|
Linear:analog voltage1²C
|
|
|
|
Analog output range
|
0.5~4.5
|
VDC
|
|
|
Respone time
|
5
|
ms
|
|
Temperature signal
|
output range
|
-10~+60
|
°C
|
|
|
Precision
|
±0.5
|
°C
|
|
Humidity signal
|
output range
|
0~100(no ice,no frost
|
%RH
|
|
|
Precision
|
±2.0(20~80%RH);±5.0(others)
|
%RH
|
|
|
Resolution ratio
|
±0.7
|
%RH
|
|
|
Respone time(63%)
|
5.0(25~75%RH)
|
msec
|
|
|
Output drift
|
±0.5
|
%RH/year
|
|
Other dimensions
|
Working power
|
5(±5%)
|
VDC
|
|
|
Working temperature
|
-5~+65
|
°C
|
|
|
Storage temperature
|
-45~+85
|
°C
|
|
|
The maximum working pressure
|
≤0.1
|
MPa
|
|
|
Working humidity
|
0~100%RH(no ice,no frost)
|
|
|
|
Warm up time
|
<50
|
|
|
|
Mechanical connection
|
ISO22mm
|
|
|
|
Electrical interface
|
6 pin socket,CDR-6
|
|
|
|
Calibration mode
|
Air(20°C,101.325kPa)
|
|
Remark:1.The above parameters at 20 ° C, 101.325 kPa measured.
2.I2C is 14 bits.
Product selection
The unit of maximum flow is SLPM,for example 250 represents maximum flow of 250SLPM;
The unit of maximum flow is cmH2O,for example 40 represents maximum flow of 40cmH2O;
For example, FS6122-50F200-5P40-TH1 represents flow range of -50~+200SLPM, pressure range of -5~+40cmH2O ;temperature and humidity output.
