Product features
High sensitivity
Loss of pressure is small
Easy installation
Technical parameters
|
Parameters
|
FS8001
|
FS8003
|
Unit
|
|
Flow range
|
(0~500)sccm
|
(0~6)SLPM
|
m/sec
|
|
Precision
|
±(2+0.5FS)
|
%
|
|
Repetitive
|
±1.0
|
%FS
|
|
Zero output drift
|
±30
|
mV
|
|
Output drift
|
±0.12%
|
%/℃
|
|
The response time
|
5
|
ms
|
|
Working power
|
8~24
|
VDC
|
|
Output way
|
Linear:analog voltage0.5~4.5VDC/I²C
|
|
|
Maximum working pressure
|
≤0.5
|
MPa
|
|
Working temperature
|
0~+55
|
℃
|
|
Storage temperature
|
-20~+65
|
℃
|
|
Working humidity
|
<95%RH(no ice,no frost)
|
|
|
Mechanical interface
|
M5 screw hole Rc1/8(entrance)/M5 screw hole(export)
|
|
|
Electrical interface
|
SM05B-SRSS-TB(JST)
|
|
|
Calibration mode
|
Air(20°C,101.325kPa)
|
|
Remark:The above parameters at 20 ° C, 101.325 kPa measured.
Mechanical dimensions
