Lab CVD System with 1500-1500C Dual Zone Rotary Tube Furnace
The CVD system consists of gas supply system + tube furnace + vacuum system, and the maximum temperature can reach 1200 degrees, 1400 degrees, 1600 degrees, and 1700 degrees. The heating zone can be single temperature zone, dual temperature zone, three temperature zone, etc. The ultimate vacuum can reach 10-3Pa. The gas supply system can be mass flowmeter or float flowmeter for flow regulation. The number of mixing channels can be 2 channels, 3 channels, 4 channels, and 5 channels.
Detailed technical parameters
|
Model
|
1500-1500-I 1500-1500-II
|
|
Power
|
9KW 9KW
|
|
Tube
size
|
Dia
60(OD) X1400 mm Dia 80(OD) X1400 mm
|
|
Supply
voltage
|
380V 380V
|
|
Phase
|
dual phase dual phase
|
|
Tube
|
Corundum tube: high purity AIO
ceramics (including) 99.5%
|
|
Heating
element
|
First
temperature zone:silicon carbon rod Second temperature zone: silicon carbon rod
|
|
Furnace tube rotation speed
|
With stepless variable speed motor,
the speed can be adjusted between (1-25 RPM)
|
|
Motor power
|
40W
|
|
The furnace can be tilted at an Angle
|
0-30degree
|
|
Kind of drive
|
Toothed belt and gear
|
|
Control
mode
|
UAV program temperature control instrument
(standard)
1, 30-stage program temperature control
intelligent PID adjustment.
2. With over-temperature protection, the electric
furnace heating circuit is automatically cut off when the temperature is
over-temperature or broken, (when the electric furnace temperature exceeds
1520 degrees or the thermocouple is blown, the AC relay on the main circuit
will be automatically disconnected, the main circuit is broken. On, the ON
light on the panel is off, the OFF light is on, and the limited protection
electric furnace).
3, with 485 communication interface (standard
when purchasing software)
4, with power-off protection function, that
is, when the power is turned on after the power is turned off, the program
does not start from the starting temperature, but the furnace temperature
rises from the time of power failure.
5, the meter has the function of temperature self-tuning
(you need to pay extra for the replacement
of imported instruments, optional)
  
FP93 instrument
EUROTHERM instrument
Touch screen
instrument
(shimaden, Japan)
|
|
Furnace material
|
1. High quality high purity alumina polycrystalline
fiber curing furnace formed by vacuum filtration.
2. Adopt Japanese technology for molding.
|
|
Control
accuracy
|
+/- 1℃
|
|
Trigger
|
Phase-shifted
trigger
|
|
Electric
appliance
|
Zhejiang
chint
|
|
Silicon
controlled
|
106/16ESEMIKRON
|
|
The
highest temperature in the first and second temperature zones
|
1500℃
|
|
Rated
temperature in the first and second temperature zones
|
1400℃
|
|
Heating
rate
|
≤20℃/ Min(it can be modified as required)
|
|
Recommended
rate of temperature rise
|
≤10℃/ Min
|
|
Thermocouple
|
S typein the first
temperature zone
S
typein the second temperature region
|
|
Length
of heating section in the first and second temperature zones
|
300+300mm 300+300mm
|
|
Constant temperature length
|
450mm 450mm
|
Gx-3 three-channel air supply (mixed
air) system
1.1. The gas exits the cylinder, is
depressurized through a pressure reducing valve, passes through the PTFE tube
to the inlet of the gas supply system, and then passes through the mass flow
meter to control the gas flow, and then passes through the gas mixing tank and
then enters the furnace inlet.
1.2.
A pressure gauge is attached to the gas mixing tank, and the pressure gauge
display disk and the proton flowmeter controller are installed on the same
panel.
1.3.
Each gas line has a high pressure shut-off valve for safety.
1.4.
The gas path adopts a high-precision gas mass flow meter, and the inside of the
gas path is entirely made of stainless steel pipe, which has good corrosion
resistance.
1.5.
All the joints in the box are connected by stainless steel ferrules, which have
good air tightness and high pressure resistance.
2. Technical parameters:
Pneumatic channel: 3
Gas flow control:
mass flow meter.
Cabinet dimensions:
600X600X600mm
Mass flowmeter
technical parameters:
Interface: Φ6
Display: LED
Working environment temperature: 5~45°C
Flow controller:
Proton flow controller parameters Please check back
Stainless steel tube:
Φ6 outside X Φ4
Pressure vacuum
table: -0.1～0.15 MPa, 0.01
MPa/division
Stop valve: Φ6
Flow control: PLC
intelligent control
3. Mass flowmeter
technical parameters:
Product
Name: Mass Flow Controller
Product
Description : Normal type, analog circuit
Product
details: Ordinary, analog circuit, rubber seal, tubular shunt, not easy to
block.
Main
indicators: Range: 5, 10, 20, 30, 50, 100, 200, 300, 500 SCCM, 1, 2, 3, 5, 10
SLM (you can choose the range arbitrarily)
•
Accuracy: ±1% F.S
•
Linear: 0.5% F.S
•
Repeatability: ±0.2% F.S
•
Response time: 1S
•
Air pressure drop: <0.01MPa
•
Maximum pressure: 3MP
•
Working environment temperature: 5～45°C
•
Input and output signals: 0~+5.00V
•
Power: +15V 50mA -15V 50mA
•
Dimensions: 158*30*110
•
Weight: 0.9 Kgg
4. Configuration of the gas
supply system:
1. Proton flowmeter: 3
2. Mechanical pressure gauge (range -0.1~0.15MPa): 1
3. Stainless steel cut-off valve: 4
4. Stainless steel plate joints: 4
5. Stainless steel valve connector: 2
6. Stainless steel cylinder connector: 3
7. PTFE tube: 15M
8. Mixing tank Dia80X140MM: 1
9.
Furnace rack: 1 set
VS High Vacuum System
|
Molecular pump unit
(Option 1 or option
2)
|
Unit input voltage
|
380V /220V
|
|
Bellows
|
KF40X1000
|
|
Vacuum baffle valve
|
KF40
|
|
|
600X600X600
|
|
molecular pump
(Option 1)
|
Model
|
FJ620
|
|
input voltage
|
380V
|
|
Inlet flange
|
DN160
|
|
Pumping rate L/S (to air)
|
600
|
|
ultimate pressure（Pa)
|
6×10-7
|
|
type of cooling
|
water-cooling
|
|
cooling water pressure（MPa）
|
0.1-0.2
|
|
cooling water temperature
|
<25℃
|
|
environment temperature
|
0~40℃
|
|
Recommended starting pressure
|
<100pa
|
|
Fore-stage vacuum pump
TRP-24 of molecular pump
(FJ620 molecular pump must
be equipped with previous pump)
(Option 2
|
功率
|
0.75KW
|
|
电压
|
380V
|
|
转速
|
1450rpm
|
|
· Inlet Diameter
|
KF25/KF40
|
|
Pumping rate of front engine（L/S）
|
6
|
|
Ultimate pressure
|
4X10 -2Pa
|
|
Germany Pfeiffer vacuum pump
(Option 2)
|
voltage
|
220V
|
|
power
|
110W
|
|
Extraction interface
|
KF40
|
|
weight
|
150KG
|
|
Pumping speed of front engine
|
0.9m 3/ h
|
|
pumping rate（N2）
|
33L/S
|
|
composite vacuum gages
|
model
|
ZDF
|
|
power supply
|
220V 55W
|
|
control accuracy
|
± 1%
|
|
Vacuum gauge measuring range
|
10-5 -10 5 Pa
|
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
