Lab DC Magnetron Sputtering Coater Machine with Rotary Stage & Water Chiller
VTC-16-SM is a High Power Desktop Magnetron Plasma Sputtering Coater with a water cooling 2" target head, water chiller and rotatable sample holder. The coating unit is designed for coating all metallic films up to 4" diameter wafer including Zn, Al, Ti and carbon light film at an affordable cost. One Al target is included for immediate use. (Since May 18, 2015, this product no longer comes with vacuum pump in standard package.)
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Input Voltage
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220 VAC 50/60Hz
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110 V power is available by using a 1000 W transformer (15 A fuse). The transformer is sold separately.
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Output Power
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1600 VDC
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250 W
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150 mA max.
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Built-in over current protection (>150 mA)
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Specimen Chamber
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Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
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Sputtering Head &
Specimen Stage
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2“ flexible magnetron sputtering head with water cooling jacket is included (Fig.1)
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One 50 mm Dia stainless steel sample stage is rotatable from 0 - 5 RPM
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One manually operated shutter for target protection. (Fig.2)
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Sputtering head holder is available for holding sputtering head while non-operation.
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The distance between the sputtering head and sample stage is adjustable from 60 - 100 mm.
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Max Coating area: 4" diameter max.
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One Air Cold Recirculating Water Chiller 10 L/min Flow is included for cooling sputtering head. (Fig.6)
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Control Panel
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6" color touch-screen control panel with PLC integration for easy operation
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One panel for all parameters monitor and control: vacuum, current.
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Ultimate Vacuum Pressure
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Built-in KF25 vacuum port
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The system requires an Ar gas tank with pressure regulator. (not included)
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< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air)
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< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
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The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking
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Gas Atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better plasma coating
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The system requires an Ar gas tank with the pressure regulator (not included)
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Target
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· One 2" Copper target is included for testing, Target size: 2" Dia.x 2.5mm.
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It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every kind of metallic material.
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Warning : Aluminum , Chromium or Nickel Target can be coated by this machine, but please view the Recommend Coating Method before using.
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Please using RF Plasma Magnetron Sputtering for coating Alumina
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Optional Film Thickness Monitor
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Film thickness monitor is optional at extra cost
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Heatable sample stage up to 500°C is available upon request at extra cost
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Flowmeter for accurate control gas inlet is available upon request at extra cost.
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Overall Dimension
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L 440 mm×W 330 mm × H 290 mm
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Net Weight
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Shipping Weight & Dimension
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Compliance
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CE approval
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NRTL Certification is available upon request at extra cost, please contact our sales representative for quote.
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Warranty
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One year limited with lifetime support
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Application Notes
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Warning: Sputtering head connects to HIGH voltage. The operator must wear gloves during operation
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Make sure the target, sputtering head, substrate, and heating stage are clean before coating, need to use the sandpaper and alcohol to clean and fresh the Al or Nickel target each time using.
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Packing and Shipping
-The main parts will be wrapped with foam,then put into the carton; the mainbody portion will be packed in wooden cases;
-Both neutral and customized packaging can be available.
-We can ship the goods to you by International Express such as DHL,UPS,TNT,EMS and so on, you can also choose the appropriate one based on your timeline and budget. Besides,you can choose to use your own shipping agent
