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Input Voltage
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108V-220 VAC 50/60Hz
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110 V power is available by using a 1000 W transformer (15 A fuse).
The transformer is sold separately.
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Output Poer
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1600 VDC
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250 W
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150 mA max.
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Built-in over current protection (>150 mA)
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Specimen Chamber
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Quartz glass tube, 165 mm OD. X 150 mm ID x 250 mm Height
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Please click here to order the Quartz Chamber replacement.
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Sputtering Head
& Specimen Stage
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2“ flexible magnetron sputtering head with water cooling
jacket is included (Fig.1)
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One 50 mm Dia stainless steel sample stage is rotatable
from 0 - 5 RPM
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One manually operated shutter for target protection. (Fig.2)
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Sputtering head holder is available for holding sputtering head while
non-operation.
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The distance between the sputtering head and sample stage is
adjustable
from 60 - 100 mm.
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Max Coating area: 4" diameter max.
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One Air Cold Recirculating Water Chiller 10 L/min Flow for cooling
sputtering head,
the water chiller is optional . (Fig.6)
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Control Panel
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6" color touch-screen control panel with PLC integration for
easy operation
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One panel for all parameters monitor and control: vacuum, current.
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Ultimate Vacuum
Pressure
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Built-in KF25 vacuum port
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The system requires an Ar gas tank with pressure
regulator. (not included)
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< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu,
Mo targets (not sensitive to air)
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< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg,
Li, Lr, Ti, Zn targets (sensitive to air)
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The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight
and baking
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Gas Atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better
plasma coating
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The system requires an Ar gas tank with pressure
regulator (not included)
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Target
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One 2" Copper target is included for testing,
Target size: 2" Dia.x 2.5mm.
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It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every
kind of metallic material.
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Warning : Aluminum ,Chromium or Nickel Target can be coating by
this machine, but please view the Recommend Coating Method before
using.Please using RF Plasma Magnetron Sputtering for coating Alumina
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Optional Film
Thickness Monitor
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Film thickness monitor is optional at extra cost
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Heatable sample stage up to 500°C is available upon request
at extra cost
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Flowmeter for accurate control gas inlet is available upon request at
extra cost.
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Overall Dimension
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L 440 mm×W 330 mm × H 290 mm
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Net Weight
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20 kg
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Shipping Weight
& Dimension
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160 lbs
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45" x 45" x 40"
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Compliance
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CE approval
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MET Certification (UL 1450) is available upon request at extra
cost, please contact our sales representative for quote.
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Warranty
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One year limited with lifetime support
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Application Notes
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Warning: Sputtering head connects to HIGH voltage. The operator
must wear gloves during operation
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Make sure the target, sputtering head, substrate, and heating stage
are clean before coating, need to use the sandpaper and alcohol to
clean and fresh the Al or Nickel target each time using.
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