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Voltage
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108/240VAC switchable
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Output Power
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1600VDC /250W /50mA max /Built-in over current (>150mA) protection
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Specimen chamber
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Quartz glass tube, 167mm OD. x 152mm ID x 260mm Height
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Sputtering Head
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2“ flexible magnetron sputtering head with water cooling jacket is
included (Fig.1)
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Specimen stage
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One 50 mm Dia stainless steel sample stage is rotatable from 0 - 5 RPM
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One manually operated shutter for target protection. (Fig.2)
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Sputtering head holder is available for holding sputtering head while non-operation. The distance between the sputtering head and sample stage
is adjustable from 60 - 100 mm.
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Max Coating area: 4" diameter max.
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One Air Cold Recirculating Water Chiller 10 L/min Flow is included for
cooling sputtering head. (Fig.6)
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Control Panel
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6" color touch-screen control panel with PLC integration for easy
operation One panel for all parameters monitor and
control: vacuum, current.
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Ultimate
Vacuum Pressure
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1.Built-in KF25 vacuum port
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2.The system requires an Ar gas tank with pressure regulator. (not included)
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3.< 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu,
Mo targets (not sensitive to air)
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4.< 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn
targets (sensitive to air)
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5.The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking
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Gas Atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better plasma coating.
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The system requires an Ar gas tank with pressure regulator (not included)
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Target
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Target size: 50 mm dia. x (0.1 - 3) mm,thickness
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One 2" Aluminium target is included
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Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are
available upon request.
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Aluminum Target Recommend Coating Method
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Optional Film
Thickness Monitor
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Target size: 50 mm dia. x (0.1 - 3) mm,thickness
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One 2" Aluminium target is included
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Also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Mg, etc. These targets are
available upon request.
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Aluminum Target Recommend Coating Method
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Overall Dimensions
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L 440mm×W 330mm × H 300mm without sputtering head
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Warranty & Certificate
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One year limited with lifetime support CE certified
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