Since the 2000s, Lam has started to develop the deposition equipment again, and launched VECTOR PECVD, which can manufacture the deposition process of the dielectric layer film, make the dielectric layer film very smooth and defect-free, and provide the same quality assurance and efficiency as the new system at a lower cost.
Lam will have more advantages to support the conversion of key technologies in the semiconductor industry, including the 3D architecture of advanced logic and NAND memory units, and the microfabrication technology of 450mm (mm) wafers, through the acquisition of Novellus Systems, an equipment manufacturer specializing in innovative film deposition and surface treatment production lines.
Lam also actively cooperates with asml. At present, the advanced process euv is an indispensable machine. However, when the euv is exposed, there will be some overlapping effects that will cause edge placement errors and other problems.
Lam cooperates with asml in the hard screen deposition process by developing the collaborative optimization technology of micro-imaging, etching and deposition, which can minimize the local placement error caused by random effects.
