Features：
1. Stroke 450mm
2. Payload 10Kg
3. Imported brand ACS, ELMO, Servotronix, Adtech driver for optional
4. Linear positioning stages maximum acceleration 1G,maximum speed 2m/s; rotating speed of Z-axis 500rpm
5. Optical grating positioning or magnetic grating positioning for optional
6. Suitable for semiconductor precision inspection equipment
