MFC1000 Series Mass Flow Controller

Precision:±(1.5+0.5FS)%

Repetitive:±0.5%FS

Working range/Span ratio:100:1



Technical parameters

Parameter

MFC1000-100sccm

MFC1000-1000sccm

MFC1000-20SLPM

Unit

Flow range

100sccm

1000sccm

20SLPM

Precision(Under calibration condition)

±(1.5+0.5FS)

%

Repetitive

±0.5

%FS

Zero drift (full range drift)

0.05

%FS/year

Working range/Span ratio

100:1

100:1

Maximum controllable flow

102

%FS

Typical response time

100

ms

Starting preheating time

70

ms

Working temperature

0+50

Slow range pressure loss (exhaust to atmosphere)

150

800

2000

Pa

Size

63.5x66.5x22.2

70.5x74.2x26.0

mm³

Pipe connection interface

1/8NPT (nut)

3/8NPT(nut)

Remark:Temperature drift:The error increases by 0.12% for every 1 ℃ difference from the calibrated temperature of 20℃.


Mechanical dimensions

Mass flow controller size


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