Technical parameters
|
Parameter |
MFC1000-100sccm |
MFC1000-1000sccm |
MFC1000-20SLPM |
Unit |
|
Flow range |
100sccm |
1000sccm |
20SLPM |
|
|
Precision(Under calibration condition) |
±(1.5+0.5FS) |
% |
||
|
Repetitive |
±0.5 |
%FS |
||
|
Zero drift (full range drift) |
0.05 |
%FS/year |
||
|
Working range/Span ratio |
100:1 |
100:1 |
||
|
Maximum controllable flow |
102 |
%FS |
||
|
Typical response time |
100 |
ms |
||
|
Starting preheating time |
70 |
ms |
||
|
Working temperature |
0～+50 |
℃ |
||
|
Slow range pressure loss (exhaust to atmosphere) |
150 |
800 |
2000 |
Pa |
|
Size |
63.5x66.5x22.2 |
70.5x74.2x26.0 |
mm³ |
|
|
Pipe connection interface |
1/8＂NPT (nut) |
3/8＂NPT(nut) |
|
|
Remark:Temperature drift:The error increases by 0.12% for every 1 ℃ difference from the calibrated temperature of 20℃.
Mechanical dimensions
