Product features
1. All axes are directly driven by linear motors and torque motors;
2. It is composed of a standard cross-type stageand a DDR with fully protection design;
3. Independent developed HANS series high performance bus direct drive servo driver;
4. It is adapt to absolute circular grating and incremental linear grating;
5. Repeated positioning accuracy can reach ±1um;
6. High speed, high precision and free maintenance.
