OLT-1100X-DSC-15E is a Evaporating coating system featuring single target sources:
OLT-1100X-DSC-15E is a compact evaporating coater, which is suitable for coating light metal, Al. Mg, and Li as well as carbon film to sample upto 2" wafer
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Input voltage
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AC 108V-220V
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Input Power
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< 2000W (including pump)
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Output Power
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1600VDC
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50mA max.
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Specimen chamber
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Fused glass tube, 160 mm Dia. x 120mm Height
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Specimen stage
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One 50 mm Dia.sample stage
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Max. coating area: 45 mm
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Accessories included
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156 L/m Double Stage Rotary Vane Vacuum Pump with Exhaust
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Filter, Bellows & KF-D25 Inlet -EQ-FYP
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Stainless steel bellows with KFD-25 adapter and clamps
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10L/min recirculating water chiller is included to cool
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magnetron head.
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Gas Atmosphere
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One needle valve installed to allow Ar gas inlet to achieve better
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plasma coating
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Target
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One Au target: 50 mm dia. x 0.12 mm, 1pcs is included
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Optional targets:
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Pt target (50mm dia.x0.12mm, 4N) available
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Ag target (50 mm dia. x 0.5mm, 4N) available
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Overall Dimensions
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L360mm x W300mm x H380mm
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Net Weight
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50 kg
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Warranty & Certificate
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One year limited with lifetime support
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CE certified
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Knowledge of Sputter Coating
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For the best film strength, please use plasma cleaner to clean
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sample surface before coating
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For coating Al. Zinc and graphite light weight metallic material,
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the sputtering coating is not efficient due to low energy,
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please consider to use thermal evaporating coater
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The system requires an Ar gas tank with pressure regulator
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which is not included
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1. Equipped with Rotary Vane vacuum pump, the system vacuum degree can match 10-2 Torr
2. Equipped with KF 25 Bellows and clamp, can connect with vacuum pump
3. Multi-function, can coat various metal and Carbon
