UV Masking Exposure System for Wafer Samples

UV Masking Exposure System for Wafer Samples is a  Very compact table-top system,  perfectly monochromatic at 365nm,  hard and soft contact up to 4 inches wafer.



3D Fast Cure Simple UV Curing Systems Sell Offers for 3D Resin Prints is a  Very compact table-top system,  perfectly monochromatic at 365nm,  hard and soft contact up to 4 inches wafer.


UV Masking Exposure System for Wafer Samples :

1. Very compact table-top system

2. Perfectly monochromatic at 365nm

3. Hard and soft contact up to wafer

4. Compatible with photoresists


UV Masking Curing Machine


1.Main Specifications

1.1 Size of Frame:6,8,12 inches

1.2 Kinds of Film:UV Film

1.3 Wafer Specification: 12 inches or lower

1.4 Irradiation Light Source:LED Ultraviolet Light Source   Cold Light Source  Wavelength : 365nm。

1.5 Irradiation Intensity:600-1000mW/cm2

1.6 Place Fixture:6,8,12 inches, can switch to one another

1.7 Handling Mode:Manual Take Put

1.8 Product Positioning:a fixture position does not allow it to move

1.9 Electric Power Supply:220V 350W 8A

1.10 Volume(W*L*H):645mm*620mm*195mm

1.11 Net Weight:40kg


2. Equipment Characteristics

2.1 PLC +Touch Screen  Software Control。

2.2 Irradiation Time Setting 1-999S。

2.3 Temperature monitoring, over set protection temperature, alarm

2.4 Production Capacity : about 200 pieces per hour

2.5 Pre-Nitrogen Flushing


3. Application :

UV Masking Exposure System


LED UV Exposure Machine


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