Vacuum System with VRD16 Vacuum Pump for CVD System
I. Overview
The system
(can pump the vacuum in the tube furnace to 0.6Pa) consists of a suction flange
(self-made) with KF25 interface, high vacuum baffle method, resistance vacuum
gauge, bellows, bracket (homemade), vacuum pump Connect the tee pipe at the
flange outlet, connect the resistance silicon to one end of the three-way pipe,
connect the high vacuum flapper valve to the other end, connect the flapper
valve and the vacuum pump with the corrugation of Dia25, and use the KF25 quick
clamp for the connection port. .
2. Pressure detection system
ZDR-I/ZDR-I-LED type single resistance
vacuum gauge
The resistance vacuum gauge
(also known as the Pirani vacuum gauge) uses a specially stabilized ZJ-52T
resistance gauge and applies a new constant temperature operation mode to the
constant power. At the same time, the microprocessor is used to control the
nonlinearity of the regulation. Linear processing. It has the characteristics
of stable performance, wide measuring range, fast response and small drift. And
powerful and reliable microprocessor-based relay control, serial communication
output, vacuum analog output and other functions. Particularly suitable for
rough and low vacuum measurement and control of vacuum applications.
Technical Parameters:
*
Distribution regulation: ZJ-52T resistance gauge
*
Measuring range: 10 5～10 -1 Pa
*
Number of measurements: 1 way
*
Number of control channels: 2 roads can be extended to 4 or 8 roads
*
Control range: 5 × 10 3 ~ 5 × 10 -1 Pa
*
Control mode: relay contact output, load capacity AC220V/3A (or DC28V/3A) non-inductive
load
*
Power: 90-260V/50Hz or 220V ± 10% 50Hz
*
Power consumption: 25W
*
Weight: 4Kg/3Kg/0.5Kg (depending on the chassis)
*
Chassis size: 240 × 88 × 280 or 265 × 119 × 280 or 96 × 96 × 120
480
× 88 × 280 or 480 × 119 × 280 (width × height × depth)
Performance characteristics:
*LED
green screen digital display.
*
Wide range of star surveys
*
Fast response speed
*
Microcomputer correction regulates nonlinearity and reduces measurement errors.
*
Optical isolation, digital filtering, enhanced anti-interference ability.
*
PVC color panel, beautiful appearance.
*
Point control or area relay control output, while the set point has power-down
protection memory function.
3. Adopt VRD16 vacuum pump
|
VRD16
|
Technical term
|
Specification
|
|
VRD-16
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Pumping speedm³/h（L/s）
|
50Hz
|
16 m³/h
|
|
4.4 L/s
|
|
60Hz
|
19.2 m³/h
|
|
5.2 L/s
|
|
Limit partial pressure - no gas ballast（Pa）
|
4x10-2
|
|
Limit total pressure - no gas ballast（Pa）
|
4x10-1
|
|
Limiting total pressure - gas ballast（Pa）
|
8x10-1
|
|
power supply
|
Single phase/three phase
|
|
motor power（KW）
|
0.75 KW/0.55 KW
|
|
Inlet/outlet connectionDN
|
KF25
|
|
oil capacity
|
0.9-1.5 L
|
|
motor speed（rpm）
|
50Hz
|
1440 rpm
|
1 Standard exported package: Internal anticollision protection, external export wooden box packaging.
2 Shipping by express, by air, by sea according to customers' requirements to find the most suitable way.
3 Responsible for the damage during the shipping process, will change the damage part for you for free.
